JPH0481132B2 - - Google Patents

Info

Publication number
JPH0481132B2
JPH0481132B2 JP60029407A JP2940785A JPH0481132B2 JP H0481132 B2 JPH0481132 B2 JP H0481132B2 JP 60029407 A JP60029407 A JP 60029407A JP 2940785 A JP2940785 A JP 2940785A JP H0481132 B2 JPH0481132 B2 JP H0481132B2
Authority
JP
Japan
Prior art keywords
plasma
light
polarized light
light source
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60029407A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61189440A (ja
Inventor
Yoshiaki Aoki
Naoyuki Kayukawa
Hatsuo Yamazaki
Yasutomo Ozawa
Hirotaka Kitagawa
Original Assignee
Hokkaido Daiga Kuchyo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokkaido Daiga Kuchyo filed Critical Hokkaido Daiga Kuchyo
Priority to JP60029407A priority Critical patent/JPS61189440A/ja
Priority to US06/815,071 priority patent/US4707147A/en
Publication of JPS61189440A publication Critical patent/JPS61189440A/ja
Publication of JPH0481132B2 publication Critical patent/JPH0481132B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0014—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0014—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
    • G01J5/0018—Flames, plasma or welding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/58—Radiation pyrometry, e.g. infrared or optical thermometry using absorption; using extinction effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/59—Radiation pyrometry, e.g. infrared or optical thermometry using polarisation; Details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Plasma Technology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Radiation Pyrometers (AREA)
JP60029407A 1985-02-19 1985-02-19 プラズマ物性測定装置 Granted JPS61189440A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60029407A JPS61189440A (ja) 1985-02-19 1985-02-19 プラズマ物性測定装置
US06/815,071 US4707147A (en) 1985-02-19 1985-12-30 Device for measuring plasma properties

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60029407A JPS61189440A (ja) 1985-02-19 1985-02-19 プラズマ物性測定装置

Publications (2)

Publication Number Publication Date
JPS61189440A JPS61189440A (ja) 1986-08-23
JPH0481132B2 true JPH0481132B2 (en]) 1992-12-22

Family

ID=12275277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60029407A Granted JPS61189440A (ja) 1985-02-19 1985-02-19 プラズマ物性測定装置

Country Status (2)

Country Link
US (1) US4707147A (en])
JP (1) JPS61189440A (en])

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5249865A (en) * 1992-04-27 1993-10-05 Texas Instruments Incorporated Interferometric temperature measurement system and method
US5436443A (en) * 1994-07-06 1995-07-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Polaradiometric pyrometer in which the parallel and perpendicular components of radiation reflected from an unpolarized light source are equalized with the thermal radiation emitted from a measured object to determine its true temperature
US5718511A (en) * 1995-06-30 1998-02-17 Lam Research Corporation Temperature mapping method
US5654796A (en) * 1995-12-22 1997-08-05 Lam Research Corporation Apparatus and method for mapping plasma characteristics
US5788374A (en) * 1996-06-12 1998-08-04 The United States Of America As Represented By The Secretary Of Commerce Method and apparatus for measuring the temperature of a liquid medium
US6995835B2 (en) * 1997-03-03 2006-02-07 Nir Diagnostics Inc. Method and apparatus for measuring analytes in blood bags
WO1998038961A1 (en) * 1997-03-03 1998-09-11 Cme Telemetrix Inc. Method and apparatus for screening plasma for interferents in plasma from donor blood bags
WO2001061367A1 (en) * 2000-02-14 2001-08-23 Tokyo Electron Limited Device and method for measuring an electric field inside a plasma
JP2002214047A (ja) * 2001-01-17 2002-07-31 Noritake Co Ltd 温度分布測定方法および装置
US6677604B2 (en) * 2001-03-30 2004-01-13 Tokyo Electron Limited Optical system and method for plasma optical emission analysis
JP2006318800A (ja) * 2005-05-13 2006-11-24 Univ Nagoya プラズマ電子温度の測定方法および測定装置
US20070009010A1 (en) * 2005-06-23 2007-01-11 Koji Shio Wafer temperature measuring method and apparatus
KR100978397B1 (ko) * 2008-06-20 2010-08-26 한국기초과학지원연구원 플라즈마 밀도 분석 시스템
US7986408B2 (en) * 2008-11-05 2011-07-26 Rosemount Aerospace Inc. Apparatus and method for in-flight detection of airborne water droplets and ice crystals
KR101121056B1 (ko) 2009-06-26 2012-03-19 한국기초과학지원연구원 가우시안 빔 안테나를 이용한 플라즈마 밀도 측정용 간섭계
JP5854381B2 (ja) * 2011-12-15 2016-02-09 国立研究開発法人日本原子力研究開発機構 算出装置、算出方法、算出プログラム
KR101357883B1 (ko) * 2011-12-30 2014-02-04 한국원자력연구원 시간 분해능을 이용한 다중 간섭 장치
CN103068136B (zh) * 2012-12-11 2015-08-19 华中科技大学 基于二象限探测器的放电等离子体电子密度测量装置
JP6309200B2 (ja) 2013-03-26 2018-04-11 三菱重工業株式会社 雷電流計測装置及び雷電流計測方法
WO2014200474A2 (en) 2013-06-12 2014-12-18 Halliburton Energy Services, Inc. Optical computing devices with birefringent optical elements
WO2015068048A1 (en) * 2013-11-11 2015-05-14 King Abdullah University Of Science And Technology High repetition rate thermometry system and method
US20200194153A1 (en) * 2018-12-18 2020-06-18 Massachusetts Institute Of Technology Electromagnetic Pulse Source Using Quenching Superconducting Magnet
US12159768B2 (en) * 2019-03-25 2024-12-03 Recarbon, Inc. Controlling exhaust gas pressure of a plasma reactor for plasma stability

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3317737A (en) * 1963-11-05 1967-05-02 Kopsel Manfred Photoelectric device for measuring the spectral line intensities of a radiating plasma with background radiation correction means
US3462224A (en) * 1966-10-17 1969-08-19 Boeing Co Polarization pyrometer
US3734620A (en) * 1971-04-01 1973-05-22 Ibm Multiple band atomic absorption apparatus for simultaneously measuring different physical parameters of a material
US3817622A (en) * 1972-12-26 1974-06-18 Nasa Measurement of plasma temperature and density using radiation absorption
US4020695A (en) * 1975-09-18 1977-05-03 Jones & Laughlin Steel Corporation Method and apparatus for measurement of surface temperature
US4140393A (en) * 1976-02-23 1979-02-20 University Of Arizona Birefringent crystal thermometer
FR2508637A1 (fr) * 1981-06-25 1982-12-31 Paris X Nanterre Universite Perfectionnements apportes aux procedes de mesures a distance de l'emissivite et/ou de la temperature vraie d'un corps a surface relativment lisse

Also Published As

Publication number Publication date
US4707147A (en) 1987-11-17
JPS61189440A (ja) 1986-08-23

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